A METHOD OF GROWING A THIN FILM, A METHOD OF FORMI

专利名称：A METHOD OF GROWING A THIN FILM, A

METHOD OF FORMING A STRUCTURE ANDA DEVICE.

发明人：LANG, CHRISTIAN,HUANG, YING JUN

JAMES,ALTEBAEUMER, THOMAS HEINZ-HELMUT,DAY, STEPHEN,HEFFERNAN,JONATHAN

申请号：EP09800482申请日：20090724公开号：EP2319069A4公开日：20130109

摘要：A method of growing a thin film comprises growing a thin film by conformallyforming at least one layer over a substrate having structures extending from a surface ofthe substrate, whereby the or each layer is formed over the surface of the substrate andover the structures extending from the surface. The thickness of the conformal layer, orthe sum of the thicknesses of the conformal layers, is at least half the average spacing ofthe structures, and; at least one of the height of the structures, the average spacing ofthe structures and the size of the smallest dimension of the structures is set so as toprovide an enhanced growth rate for the or each conformal layer (compared to thegrowth rate over a planar substrate).

申请人：SHARP KABUSHIKI KAISHA

更多信息请下载全文后查看