Methods for forming an assembly for transfer of a

专利名称：Methods for forming an assembly for

transfer of a useful layer

发明人：Fabrice Letertre,Olivier Rayssac申请号：US10800252申请日：20040311公开号：US07122095B2公开日：20061017

专利附图：

摘要：Methods for forming an assembly for transfer of a useful layer are described. Inan embodiment, the method includes forming a useful layer on a first support having aninterface therebetween, and a residual material on a portion of the first support to formthe assembly, and processing the assembly to attenuate any bond between the usefullayer and the first support caused by the residual material. An implementation of themethod includes processing the assembly to remove residual material. In anothervariation, processing of the assembly includes forming at least one cut or separatingchannel between a free surface of the useful layer and the interface to separate theuseful layer from contact with the residual material. In yet another variation, processingof the assembly includes forming a peripheral recess so that the residual material doesnot contact the useful layer.

申请人：Fabrice Letertre,Olivier Rayssac

地址：Grenoble FR,Grenoble FR

国籍：FR,FR

代理机构：Winston & Strawn LLP

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