专利名称：Integrated circuit capacitor having
antireflective dielectric
发明人：Bill Alan Wofford,Blake Ryan Pasker,Xinfen
Chen,Binghua Hu
申请号：US11077074申请日：20050310公开号：US07118959B2公开日：20061010
专利附图：
摘要：A capacitor () is disclosed that is formed as part of an integrated circuit (IC)fabrication process. The capacitor () has conductive top and bottom electrodes () and a
nonconductive capacitor dielectric (). In one example, the dielectric () includes first andsecond thin dielectric layers () that sandwich a layer of antireflective material (). The thinlayers () provide the dielectric behavior necessary for the capacitor while the
antireflective layer () promotes reduced feature sizes by mitigating reflected standingwaves, among other things.
申请人：Bill Alan Wofford,Blake Ryan Pasker,Xinfen Chen,Binghua Hu
地址：Dallas TX US,Wylie TX US,Plano TX US,Plano TX US
国籍：US,US,US,US
代理人：Peter K. McLarty,W. James Brady, III,Frederick J. Telecky, Jr.
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