Pressure Sensor Apparatus

专利名称：Pressure Sensor Apparatus发明人：David J. DiPaola,Jeffrey P. Silveria申请号：US124729申请日：20090527

公开号：US20090293630A1公开日：20091203

专利附图：

摘要：A high pressure, miniature pressure sensor has a cup-shaped housing having anopen end closed by a metal substrate. A raised stress isolation pedestal portion isformed on the substrate that receives a stress isolation glass pedestal element and inturn a silicon pressure sense element, all having closely matched CTEs to minimize

temperature induced stresses. A fluid passageway is formed through the substrate andglass pedestal and an O-ring is placed around the passageway on the lower side of thesubstrate. A flexible circuit having a slit tail formed with two lobes for receipt respectivelyin the housing and on the substrate allows easy access of a solder iron during assembly.Mounting flanges extend from the substrate to facilitate mounting of sensor andminimize transfer of mounting stresses to the sense element.

申请人：David J. DiPaola,Jeffrey P. Silveria

地址：Norwood MA US,North Attleboro MA US

国籍：US,US

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