专利名称：Silicon polymers, methods of polymerizing
silicon compounds, and methods of formingthin films from such silicon polymers
发明人：Dmitry Karshtedt,Joerg Rockenberger,Fabio
Zurcher,Brent Ridley,Erik Scher
申请号：US13897296申请日：20130517公开号：US08846507B2公开日：20140930
专利附图：
摘要：Compositions and methods for controlled polymerization and/or
oligomerization of hydrosilanes compounds including those of the general formulaeSiHand SiHas well as alkyl- and arylsilanes, to produce soluble silicon polymers as aprecursor to silicon films having low carbon content.
申请人：Dmitry Karshtedt,Joerg Rockenberger,Fabio Zurcher,Brent Ridley,Erik Scher
地址：San Francisco CA US,San Jose CA US,Brisbane CA US,San Carlos CA US,SanFrancisco CA US
国籍：US,US,US,US,US
代理机构：Murabito Hao & Barnes LLP
代理人：Andrew D. Fortney
更多信息请下载全文后查看
因篇幅问题不能全部显示，请点此查看更多更全内容